国際活動
2004年6月10日
- 国際会議
- 学会発表リスト
[7th APCPST(Asia Pacific Conference on Plasma Science and Technology) and 17th SPSM(Symposium on Plasma Science for Materials)]
-June, 2004, Fukuoka, Japan-
■ Reaction of Si with Excited Nitrogen Species in Pure Nitrogen Plasma near Atmospheric Pressure
Ryoma Hayakawa